??????????????????????????????е????????????CMUT???????????е????????????PMUT????????CMUT???????????????л??????PMUT????????????л??????PMUT????CMUT??????о??????????????г??????????CMUT?????????豸?????CMUT????????????????????????Χ??70-140 V?????????????CMUT????á?

PMUT?????????????????????1???????????????????????????????????????豸???????豸?????????????????????籡???????????????PMUT????????????е???????????????????PZT???????????AlN????PMUT????????????????????????????PZT PMUT???з???????????????????棬PZT???糣???????????????????????PZT???????????????????CMOS???????????????糣?????????AlN??PMUT???и????????????AlN PMUT???CMOS??????????AlN????????????????????????о?????????????????????CMOS???????????￡????Sc?????????????AlN??????????ScAlN??????????μ????????ScAlN PMUT???????δ?????????

????????????????????????????????о??????VTT?????о?????????????Journal of Microelectromechanical Systems?????????????“Development of ScAlN PMUTs for Medical Applications”??????????????????????????????????????ScAlN PMUT????????????PMUT?????????????????о???????????20% Sc/(Sc + Al)???????AlN?????????????????????????????PMUT?????????????PMUT?????????????У????????????????????????????????????????PMUT??????????????PMUT??????????о????????????????????г??????5.7 MHz???ScAlN PMUT???е??????????13 kPa/V????????????1.1 V/MPa??????????-?????????????????????????????ScAlN PMUT??????????????????á?

???

????PMUT??????????3D?????????????1???????????裨Si????????????????20%???Sc???????AlN????????μ繅????Mo????ɡ???????μ?????????????????????PMUT???????????????PMUT????????漰??????????????????????????????У??繅???????????????????

?1 ScAlN PMUT??????

????????PMUT?????????????????????????????????????????????????????????λ????????????PMUT????????????????Σ????????????????????????????????????????仯????????????????????????????????????????PMUT?е?о????????????????????ScAlN?????????????????????????????PMUT???????????????????????PMUT????????????

PMUT???????е???????2???????????????????裨CSOI?????????????????????С??????dead space???????????20 µm??????X??Y????????????????????110 µm?????+?????????е??????????????????PMUT?????????20 µm????????????????????????????

?2 PMUT???????е????????????????????????????????繅??

????

PMUT????Okmetic???????6???CSOI??????????????PMUT?????????????/????????????γ?CSOI???????3?????

?3 ScAlN PMUT??????????????

?4 ???????PMUT???е???????????

PMUT???ü???4????????????4????????????????PMUT???е???????????PMUT????????????羵??SEM????????5?????PMUT?????????繅??Ti/Mo: 150 nm????????繅??Mo: 200 nm????????875 nm????ScAlN????

?5 ScAlN PMUT??????SEM???

????

?о?????????PMUT?????е?????96??????????22?????????1??????????????15????????н?????????????????96%????????ж???????????????????λ???PMUT?????г????????6?????λ?????????PMUT???е?г????????????????PMUT??????仯??????Si?????????仯???????????????仯?????????????仯????3%??6%????????????????????????????PMUT???????????????о?????????

?6 PMUT?????6??羧???????г?????

PMUT???????е?????????????????Onda??AIMS III?????????ò???????????????????????PMUT???????У????PCB??????????????????????С?PMUT?????????е?42????????????????????????????м?????????400 µm?????????Onda??HGL-0400???????????PMUT???в??????????????????????????ScAlN PMUT??????????80 mm?????VTT?????????AlN PMUT???б???????????????г??????5.7 MHz???ScAlN PMUT???е??????????13 kPa/V????????????1.1 V/MPa??

???????????????о?????????????????????ScAlN PMUT???????е???????о?????????PMUT????????????У?????÷???????????????????????????ScAlN???????????????PMUT????????????????????ScAlN PMUT??????????????4??????????PMUT????????????????????????CSOI??ScAlN PMUT????????з?????????????????????????????е????????????????????????????????????????ScAlN PMUT???????????????????????????????????????????MUT?????????????ScAlN PMUT??????????????????????

?????????DOI: 10.1109/JMEMS.2023.3296159

?????????

?????е???????????????????-2023?桷

?????????е????????????PMUT?????????????????-2022?桷

??????????????г?-2023?桷??