???????????????????MEMS???????????????????????????????USound?????????????????????????????????????Sketch-to-Scale?????????????????????Flex??????????????????????????????????????????????????????????????????λ??μ???Althofen????????????MEMS????????????????????????????????????

USound????????MEMS?????????????????????????????????????????????????USound??MEMS???????????С??50%??????????80%???????и???????Χ??

USound?????????????Ganymede??????MEMS??????????????????????????????????????????????VR/AR?????????/????????????????????豸??????????????????????????USound??????MEMS???????????????????г???????????????????豸??????????3D????????????

Ganymede???MEMS???????????????磬Ganymede??????????????????????????????????????????????????????????????3D??????????

???????????????ο????Iocaste

Iocaste?????????????????С????????5?????????????????????2??????????????4??MEMS????????????2???????????ε?MEMS???硢???3.7 V????????????32λ??????????????ARM Cortex-M4????USound???????????????????????衣??????????????????????????????????????????е?????

“?????????????????Ч???????????????????????????????????????????????”USound?????й?Ferruccio Bottoni???“??????????????????????????????????????????????????????????????????????????μ?MEMS???????????г???”

“??????????????????????????μ???????????????????????????????????????????”?????Althofen?????????Erich Doerflinger???????“??????????????USound?????????????????????????”

USound??MEMS?????????

USound??MEMS????????????缼?????????????????????壨????PZT?????????繅?????糡?????????????????????

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USound????????????????????????????????????

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?????????3D-SiP??????????????????USound????????????????????????????DSP?????????????????????????

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????????????????????????????????????????MEMS???????????????????????????????????????MEMS???缼?????????????????????????У????????????á?

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????MEMS???????????????????????????????????????????????????е?????????????????????????????????????

3D???

??賬С?????????磬????????С?????м???????????????????????????3D???????

USound???????????

- Austria Technologie & Systemtechnik AG??AT&S???μ????????????????????????????AT&S?????????·?壻

- Fraunhofer Institute for Silicon Technology??ISIT??????????輼???о????????????ISIT?????????????????????飻

- Institute for Electronic Music??IEM???????????о????????????IEM??????????????????????????

- STMicroelectronics???????壩???????????????????????缼????TFP???????????????????????????MEMS??????????????????????

?????????

??MEMS??????-2018?桷

?????MEMS????????????-2017?桷

??Vesper????MEMS???磺VM1000??

?????iPhone X?е?MEMS???鹼

??iPhone 7 Plus?е?￥??MEMS???磺?????????????????