????????????

???塢??????????????????????????????????????????á?????????????AFM?????к???????????????????????????????????????????

????????AFM???????????????????????????б????????????????????????У?????????????????????????????AFM?????м?????????????????????

???????????????????????????????AFM???????????????

MEMS????????????????????

MEMS???????к???????λ????з???????????г???????MEMS?????/????????????????????

???????MEMS??????????????????????????е??????????????????????????MEMS??????????

?????????????AFM????MEMS?????

????????????????о?????????????????????MEMS??????????Nano-indenter????????????????????????е???????????????????????AFM????о???ɡ?

???н?AFM??????????????????????L?ε????о?????????????????????????????AFM?????ɡ?AFM??????????H=9.5 µm ±5 µm??

??ù?????????AFM????????MEMS?о??У??AFM????????MEMS????

????AFM????о??MEMS?????????????

????AFM????MEMS????????????????

?о???????MEMS????????????о??е???????AFM??????????????????????MEMS?????????????????????????200 pm???С?????0.1 Hz??????????MEMS?????????????????0.2 Hz???????г???60 pm???????????з???????????е??????з?????3.7 nN??

MEMS?????????????????????????????????????????????????????磬????????????????????y???AFM????о???????????MEMS????????????Si<111>?????????е?????????0.31 nm????

????????????????????????

?????????ù????AFM????????MEMS????????????????????????????????????????????????????????????????????

???磬????????????????У?С??250 nm??????????????????165±7??MPa??????????????????????????????????

??????????ν??????AFM??????????MEMS????????????????????饗PDMS???????????????????????????????

????AFM????MEMS????????????????

????MEMS???????????????????о?????????AFM?????????MEMS??????????У???????????????????????600 µN???????????9.5 µm?????????????????????????1 Hz??????У?????????????0.3 nN/√Hz??4 pm/√Hz??????????????????

????MEMS??????????????????????????MPa????????????????????????????????????????????

??MEMS??????????н????????AFM??????????????????????????????10 nm???????????????????????

????AFM????MEMS???????????????

??3???Bruker???????????xProbe????????MEMS??????????????AFM????????????????????????AFM?????????Bruker??xProbe????С??2 nN??????????С??20 pm??λ??????????????????????????????/????????н??о?????????С?

Bruker????????xProbe

?????λ????????????????AFMWorkshop??????MEMS?????????????AFM???????????MEMS???????λ????????????κ??????????AFM??

???????????????????????????????Integrated Circuit Scanning Probe Instruments??ICSPI?????????????????????????о?AFM???????nGuage AFM????AFM?????????????????????????????????1 mm x 1 mm??MEMSо??С?

????

MEMS??????????????????С???????Ч??????????AFM???????????????TEM?????????????????SEM???У???????????????????λ????????????????????????????MEMS?????????????????????????????????????????????????е???????Щ?????????????

?????????

??MEMS?????????????2019????????????