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????MEMS?г????????????????????????????????????????IDM????????MEMS?г?????????????仯——??CMOS????????????????????????????????????GLOBALFOUNDRIES????????MEMS?????????????????MEMS????????????????????????????????????й??????????????GLOBALFOUNDRIES???MEMS??????Rakesh Kumar???????ù???μ???????????е?CHInano2012????????MEMS???????????????????????????“?仯?е?MEMS????MEMS Manufacturing, the changing landscape??”???????Rakesh??CMOS??MEMS??????????????????????????????????????25?????????飬??ν????????????????????????????й???????????????????????????????????????????MEMS???????????????????????????GLOBALFOUNDRIES??MEMS??????????????????????????????????????????????????????????ü????

???GLOBALFOUNDRIES???MEMS??????Rakesh Kumar???

Rakesh?MEMS???????GLOBALFOUNDRIES??????

GLOBALFOUNDRIES??MEMS????????200mm???????????500????~130?????????????????????????80%??MEMS?????豸??CMOS????豸??????20%??MEMS???е??豸????????????Щ?豸????IC????????200mm??????????MEMS????????е??

?????MEMS????????????????IC????????200mm????????????????MEMS???????????????????????????г??????????????????????????????????1?????????200mm??MEMS????????????????????????????????MEMS?????2????MEMS???????GLOBALFOUNDRIES??3???????????????????Foundry StandardProcess?????????????????????????Joint Customization Process???????????????????????Customer Proprietary Process???????й???????????????????????????????????GLOBALFOUNDRIES?????????????????????з?????????????????????δ??2-4???????????2????

MEMS?????CMOS?????????????MEMS??CMOS?????????25??IDM???????????MEMS??????????г????????????????????????MEMS??????????150mm???200mm???ЩIDM???????????????????8???????????MEMS?????????????

200mm?????MEMS????????????????????????IP???????????????IP??????????MEMS???????????????????????????????????????IDM??foundry?????????α???IP????????????????????????????????????????????????

??GLOBALFOUNDRIES????InvenSense?????Nasiri????????CMOS-MEMS?????????????Fabless???????????????????????????MEMS????У?????????????????????????????????????????????????????硢???????????????RF??????

???????MEMS??????????????1????????????????????????μ??????????2??????????????????????3???????????????????????????????????????С?????????????????????4???fabless/ fablite???????????????????????5??NFЭ?????κ?????IP??????????MEMS?????“one product - one process”???“many products – one process”??

GLOBALFOUNDRIES??MEMS???
??1?????????????????????MEMS??????飻
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GLOBALFOUNDRIES??MEMS??????????????
??1?????????????
* 1????CMOS?????MEMS?????
* 100/1000????????MEMS?????
* ?豸???/?????2010??12??
??2??????
* ???????Si?????
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* Poly TSV
* CMOS MEMS????
* MEMS????????
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* ?????????2011??3??
* ??????????2011??8??
* ????2014??????????15k????

??????

1. GLOBALFOUNDRIES?????????Щ??
Rakesh??GLOBALFOUNDRIES???????г??????????????????????????RF MEMS???????????????MEMS??

2. GLOBALFOUNDRIES?м???MEMS??????????8?磿????????
Rakesh???????????8???MEMS???????????????????????GLOBALFOUNDRIES????????????????????????????????2014?????????????????15,000??????

3. ????????????MEMS??Ψ?????????????????飬??????-￥???GLOBALFOUNDRIES????Щ????飿
Rakesh??InvenSense??MEMS???????????????????????????????饗???????????????????????????????Э?飬???????????????????顣

4. 2011???????MEMS????????????InvenSense??????????????3?????????6??????????????????????????????
Rakesh????????????????????InvenSense????????????齻??????????????????????????????????????????????????????

5. Nasiri-Fabrication Platform??GLOBALFOUNDRIES?????????????????Щ???????????Σ?
Rakesh??Nasiri?????????????????г??Ч???CMOS??MEMS?????????InvenSense???????????????????????????????????????MEMS????????????????????????????Χ????????????????
???????????????????????????????????????????????????????????

6. ?????????CMOS????????????????λ????CMOS MEMS????????GLOBALFOUNDRIES?????????к??????????
Rakesh???????????????????????????????????????MEMS??????顣????????????????MEMS??????????????????????????????????????MEMS????????????????????????????????????????????????鴴?????????????????????GLOBALFOUNDRIES???????????

7. ?????壨STMicroelectronics????TSV????MEMSо????????????????????TSV?????3D IC??δ???????GLOBALFOUNDRIES??β????
Rakesh?????????TSV????????СMEMS?????????磬????????MEMS???????????????????????MEMS?????????????????TSV??????????????á?

8. ??Teledyne DALSA????GLOBALFOUNDRIES??????????
Rakesh??Teledyne DALSA?????????????????????????????????????????????MEMS??????С?????????????????GLOBALFOUNDRIES???????????IC?????????????????????λ???????????????豸??????????????????????????????????????InvenSense??GLOBALFOUNDRIES?????????????

9. ?й?????MEMS???????Start up??????С????GLOBALFOUNDRIES????????????????????????й???λ??
Rakesh???????й??????к??С???Fabless???????????????????????Щ???????????????????????????????????Щ???????EDA??????飬?????Fabless???????????????????????????з???

10. GLOBALFOUNDRIES?????????MEMS??????????????δ?????????
Rakesh????????2011???MEMS????????????Щ?????????????????????????????????????2014????????MEMS?????????????

????????

GLOBALFOUNDRIES????????￡????????????????й?????????????????????????λ???????徧??????????2009??3?3?????????????????????????????????????????????160????????????????????????????????????????????????????1??????????????GLOBALFOUNDRIES????????????Ψ????????????????????????????????????????????????????3??300mm??????5??200mm??????????????????????????????????????????????????????Щ?????з?????????????????Щ?????????????????????????????????????????

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