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?????豸???????Plasma-Therm??????????CORIAL
2018-06-16 14:04:27   ????????????   ?????0   ?????

?????????????????????????????????????????????????豸?????????????Plasma-Therm?????????????????????????????豸?????CORIAL?????????????δ?????

?????豸???????Plasma-Therm??????????CORIAL

?????????????????????????????????????????????????豸?????????????Plasma-Therm?????????????????????????????豸?????CORIAL?????????????δ?????

Plasma-Therm???????Deep Silicon Etch™???豸??MEMS/NEMS????????

Plasma-Therm???????Deep Silicon Etch™???豸??MEMS/NEMS????????

“??ν???????????Э?Ч????????????????????????????????????????????????????????????????????????????β???????????????????????????????????????Plasma-Therm??????г??????????” Plasma-Therm?????й?Abdul Lateef?????“????????????????????Grenoble????????????о??????????????????????????????” Abdul Lateef??????????

Plasma-Therm?г????Thierry Lazerand???????“??CORIAL??????????????????????з???????г????????????????????С?????????????????豸?г??????????????????????CORIAL??????????????в??????????????????????????????????????Plasma-Therm????????????VLSI?????????????????????”

“??????????Plasma-Therm????????”CORIAL????з???Andrei Uvarov???“?????CORIAL??????????????????????CORIAL??Plasma-Therm???????????????????????????δ?????????????????豸??????????????????????????”

?????????

??MEMS??????-2018?桷

???????????豸?г?-2017?桷

??????????豸?????-2017?桷

?????????????и??豸?г?-2016?桷

??3D??????????豸??????г?-2017?桷

?????????????????豸 ????????? ?????? ????豸

??????MEMS???????????????SMG???700?????????
?????????????5000??????????????·???????????1?ACEINNA??????