?????????????????????????????????????LiDAR????????????????÷?????????Щ???????????????????????????????????????·?У????????????????????ù裨Si?????????????????????λ < 1.1 μm?????????????????????????????1????????????????????SPAD?????????

??????????????????????????????????University of Toronto?????1?????·?????????????о?????Max Planck Institute of Microstructure Physics?????????Advanced Micro Foundry??AMF??????????????npj Nanophotonics????????????“Room-temperature waveguide-coupled silicon single-photon avalanche diodes”????????????????????????????????Alperen Govdeli??????????????????Alperen Govdeli??Joyce K. S. Poon??

?????о???????????????????SPAD??????????????????VIS??????????????????????????и??????????????????У??????????????????????????????????????????????????????MEMS???????????????????о??????????????????μ???????Ч???PDE????????????DCR??????????????????о??????????????????????????????μ?????????·?п??????·??

?1a???????????SPAD?????????????y???????裨SiN???????′???PN??????棨Si mesa????ɡ?SiN?????е??????????????Si mesa????о??????·??SiN???????????150 nm?????500 nm????????α????????????????????о???????SiN??????????5.2 μm??С??о??в??????????Wgw??500 nm???1b???1d?SPAD???????????????????

?1 ???????????SPAD

??????????SPAD????????????????о????????????2???????á??????????????NKT Photonics SuperK Fianium???????λ = 488 nm??532 nm??????????????????С??2.5 nm??????????????????????????????????????????????????????????о??????????????У???о?????з????????????????????????????????SPAD???????о????????????2b???????????????·??

?2 ???????Geiger mode??SPAD?????

?о????????3?е??????????????????????????4a???4b??????????100 μm??SPAD??????????????2?????PDE??SPAD??21°C??- 5°C??- 9°C????????μ?I-V???????4c?????

?3 ???????????????????????

?4 SPAD?????????????

???????????????о?????????????????????????????2???????SPAD???????????????о???????PN?????????????????裨SOI???????????DCR????????SiN????????????????????????????????PDE???????????????????????·?????????????????????timing jitter??????Щ????SPAD??????????·??????????????????????????????????????????????

?????????https://doi.org/10.1038/s44310-024-00003-y

?????????

??????????????????SPAD?????????????????-2023?桷

??????????????????SPAD???????????-2023?桷

?????????????·??PIC?????????г?-2022?桷

????????????????????г?-2024?桷

??????????г???????-2022?桷

??С???????о???????????????г?-2020?桷

?????????LiDAR?????????г?-2024?桷

?????????????LiDAR????????????-2022?桷

??????????????????г?-2023?桷??