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MEMS?г??????

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2010?????MEMS?г???????????г??????2009??????25%????86???????????MEMS???????г????????λ???????????????

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???2011MEMS?г?

2011??????MEMS?г??????????????????7.3%?????????????????????????3%??
2011??MEMS?г??????????????????????????????г?????Щ?г??????????25%??
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