1 MEMS??????

MEMS????????MEMS??????????????????, ??????????????MEMS?????????????????????????, ??????????????λ????н????????????·??????λ????е???????, ?е?????????в??????MEMS????????о????, ???????, ????: Analog Device ???????????????10??, ?в?????g??1.2~10g????????????????????; ??в?????g??±35~±250g????)???????????????

MEMS?????????????????????????????С?????Щ?????漰???????????????????????????????????????????????????????????????????????????????????????е???????????????????????′洢?????顣

2 ??е???????

MEMS?????????????????????л?е????????, ??????????????????????????MEMS????????е??????????????????????????????????????塢Analog Devices?????Kistler?????????????ЩMEMS????????????е??????顣???????????????, ?????????з????, ?????????????????е????2000g??????μ?X??Z????????顣

?????????, ?????????????????????????????о????, ??????????????, ????????????ε????????, ???????????????б????????????????о?????????м??, ?????????????????????????????, ?????????????л???????, ?????????????????б??????????????ε????????е?????о?????

3 ?????????????????

????????е?????????????????????, ???????????o????仯???????????????????, ???????????????????

????, ?????Щ????, ????′洢??????????????????б?????е??