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???????г????2016?? vs. 2022??

VCSEL?????????????????????????MBE???????????????MOCVD???????л???????????????????GaAs??80%?????????InP??15%???????????????????????????????VCSEL ????????????廯??????????GaAs ?? InP??????In??Al ????????????????VCSEL?????????????????????????

VCSEL????SEM????

??????????????????MOCVD??????????????????????????ù?????????????????????????????л?????????????????

?????л?????????????Metal Organic Chemical Vapor Phase Deposition?????MOCVD??????????????????????????????????????????????LED????????Laser??????????Transistor????????????Solar cell????????????????????????????????VCSEL??????????????裬???????з????????????

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MOCVD??????????

?????л?????????????Metal Organic Chemical Vapor Phase Deposition?????MOCVD????????????????????????1968????????????????????????嵥??????????????????????????????????Precursor??????????????????????????????????????????????????????????????????????????????????????????γ?????????????????????????????????????????????????????????????????????????????硣

????????????????????л?????????????????У?????????????????????

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?????л????????????????????????????AIXTRON??

??????????????????AIXTRON??

MOCVD ??????????????????AIXTRON??

??????LED????г???????????GaN???????????????????????????????????????????·????壬????N?????????Ga????????????????????????????????????????????γ?????????????????????????????????????????????Epitaxy????Epitaxy ?????????????????京????“?????Stacked??”???“???к?????Arranged in layers????

???????GaN???????????????????AIXTRON??

MOCVD???????

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2018??3??30????4??1???????????????“MEMS??????????γ?”???????????У???????????????1?????MEMS??????????????????????????2???????о????????WLCSP?????????????TSV???????????????3????????????????????????????AlN??ZnO??PZT??籡????????????????FBAR??????????????????4??3D???в???????VCSEL??????????????豸????????????????????5??????MEMS????????????????????????????????????????????????????????????

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E-mail??guolei@memsconsulting.com

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?????iPhone X?????????????

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?????iPhone X?е?ams????????????

??3D????????-2017?桷

??????LED???????????????ú????????

??????RealSense 3D????????????????????????

???????淢?傷??????VCSEL???г?-2017?桷