????????????????IC??????Silicon Labs????????????????????????MEMS??Si50x????????????????????????????????????????????????????????????е???????????????XO??????Щ??e?????????????洢????楨ATM????POS??????????????????Si50x????????Silicon Labs?????CMEMS®????????????????????????а?MEMS?????????????CMOS???????????????????????“CMOS+MEMS”??о??????????

Silicon Labs?????????о?MEMS????

?????е?????????????????Silicon Labs Si50x CMEMS??????в?????и?С??硢????????????????????????????????????????????????????????о???Single-die???????MEMSг??????CMOS??????·???????CMOS+MEMS????????Silicon Labs?????г?????????????????????????????д??????????

* CMEMS??????CMOS??????????????????????????б??????????????????????????????????????????????????????

* CMEMS???????????????е????????10?????????????????????????????????VDD?仯??????????Χ????????????????????????????????????XO??MEMS??????10????

* CMEMS???????????MEMSг??????CMOS???????????????·?????????????????????????????Χ????????????????????????????????????????????????????????ο???

* CMEMSг????????????????????????????????????????????Silicon Labs????????μ???????·?????????????????С??????????????????Ч????????????????????????????????????????????

Si50x CMEMS???????32kHz-100MHz??????????????????????????±20ppm??±30ppm??±50ppm??????????Χ??????????-20????+70?棩????????-40????+85?棩??CMEMS????????????????????????????????????????????????????????????/????????????????/????????????

Si50x CMEMS??????в?????????????????г?????????????Si50x?????????????????о?????SMIC?????????????????????????????????????????????Ч??????????????????????????????????????????????????????CMEMS????????????IC?????ù???????????????4???????????????????????????????

IHS MEMS??????????????????????Jeremie Bouchaud?????“??????г?????????????????????MEMS????????????Ч?棬????????????????????Silicon Labs CMEMS??????MEMSг?????????????·???????о??????У????????????????????????????????????????????”

??Silicon Labs????????????????????Si50x???????????綨???2????????????????????Silicon Labs????????????????????????????Si50x?????????е?????MEMS????????????????????????????滻?????????

Si50x??в??????????????????????????????????

* Si501????????????OE???????????????

* Si502?????OE????????FS???????????????

* Si503?????FS???????????????

* Si504????????????????????????????????????????????????????????о??????????

Silicon Labs????????????????????Mike Petrowski?????“Si50x CMEMS??????в???????????г????????????????????????MEMS??о???????????????????????????????????????????????????????????????????????Silicon Labs????MEMS???????????????????????????????Si50x??в???????????????????????????????????????????????????????????????”