???????????????2018??10??28????30????????????Э??SEMI?????????????????????????о????2018???????????MEMS???????????л??饗???MSEC???????MSEC 2018???????“???????????????????”?????????????????????????????????????????????????????????????????????????豸????Я??????е??????????????????????????????繃?????????????????????????????MSEC 2018????????Щ??????????????????????MEMS/??????????????????????ú???μ???????г???????????????????μ???????????????????

????????????о???????DARPA?????MEMS??????????

????????????￥??????????????о???????DARPA??????????Щ?????MEMS????????????????MEMS???????????????RIPM??????????????

DARPA???????????????????Ronald Polcawich??MSEC?????????????RIPM???????????

MEMS??????

???????5?·????????????RIPM???????????????????Щ????μ?????????????н????Polcawich???????DARPA???????MOSIS??SUMMIT??HERMIT??????????RIPM???????????????MEMS??????????????????????漰“??????????”?????????

Polcawich?????RIPM????????????????????MEMS????????????????“??????и????????????”??“?????????????”????????????????????????????????к????????????С?

???????????????Polcawich??????й?LSI MEMS??IP????о?MEMS + CMOS??????????????????????????PDK??????

??Polcawich????????Щ??????PZT-on-SOI???MEMSг???????????

?μ?MEMS???????

Yole??????????к????????????Guillaume Girardin?????MEMS????????????????????????????Щ?????????????y????á?

Guillaume Girardin?????????AI????MEMS??????“?????10?????MEMS?μ???????”??MEMS????“????????????????·——?????????????????????????”??

???????????????????MEMS??????????????3D??????????λYole????????????2023??3D?????????г???????185????????????????????????20.6?????????????μ?????3D????????-2018?桷??

?????????“???????????????????????????????????????????????????????????????δ??????????”

Girardin???????MEMS??????????????????????????????????L5????????????????????????

????MEMS

???????壨American Semiconductor???????ü??????й??CEO??Doug Hackler???????й????MEMS??????????????????????о??????IC??

“???????MEMS????????”????????“???????·???????????????????????”

Hackler??????????????????“??????????????????Ч”??

??????????????????????д??￡??????????????????????????“??????????????????????”??

“?????????????????????”Hackler???“??С?????????????????????????????????????ζ???????????????????”????????????????????????????????滹?к????·????

??????????“?????????????????——??????????????????????”

????????????

Matrix Integrated Products?????Craig Easson??Sudhir Mulpuru???????????????????????????????á?Mulpuru???“???????????????????????IC???????????????豸??????????????”

???????“??????豸??????????????????”??????????“?????????????豸??????????仯???????????SpO2???????????????????????????????”

Mulpuru???“???????????С?????Σ??????????á?”?????????????Spire Healthcare Group??Health Patch??Motiv??Ring?????????????????????豸??

?????????

ULVAC Technologies????????David Mount??“????????????”?????????????????????????“?ж?????——????????????”??

?????????“δ??????????????????????????????????????????????????????????”Binbots???????????????г??????????????????????Mount???????“???????????????????????????????????磩??????”??

??Mount????????????????????????????????????????????У???????????????δ?????????????????????????????????????????λ??

???????????????????????????????????????????“??????”?????“??????”?????????о??????????????51?????????з???????????“??????????????”?????????“??????????????”

Mount??????“??????????????????????????Σ????С?”

??????????

????????????????????Marcellino Gemelli???????й????????????????????磬??????????????????????????????????????ж??????????

“????????????????????????”?????“?????????????????????????????????????????????????????????й??????????”

Gemelli???????????????????????????????????????????????????????????С?MEMS???????м????????????????????????????ζ???????????????????

??λ????????????????????????????——???????????????????????????????????????

??????????

Chirp Microsystems??CEO Michelle Kiang?????MSEC??????λ??????????????????????????????乫??????????????????????У?????У?????о????ù?????????2?±?TDK?????????

“???????????????????ú??????”???????“?????????п???????????????????????????”

Kiang???????Chirp??????????м???“???????κι????????1???”??????????????????????Щ????????????

????Chirp?????“MEMS 2.0???”???似?????????“??????”??

Kiang??????????“??????MEMS/???????????????????????????????????????????????????????????????”?????????“???Ч???????????????”

?????????????

MSEC????????????λ???????????????????????????????????????????????????????佱???y???????????Alertgy?????????????????????????????????????豸?????????????????????????????

?????????

??MEMS??????-2018?桷

??MEMS??????????г??????-2018?桷

??3D????????-2018?桷

??????????????г?-2017?桷

????????г?-2017?桷